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Browsing by Subject "wafer bonding"

Browsing by Subject "wafer bonding"

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  • Silicon Wafer Bonding Technology for VLSI and MEMS Applications: 
    Iyer, S. S., ed.; Auberton-Herv{caron}, A. J., ed. (IET, 2002)
    The book covers the following topics: wafer bonding principles; polish SOI; high volume production of SOI wafer; ELTRAN technology; wafer characterisation; advanced applications; and Si on Si wafer bonding process.