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Browsing by Subject "nanoelectromechanical systems"

Browsing by Subject "nanoelectromechanical systems"

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  • Jiang, Hongrui, ed. (IET, 2016)
    Optical MEMS are micro-electromechanical systems merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems and hold ...